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Product Catalog

Product


OEM Part Number


IND Part Number


Solaris Shield Kit 250012102
MxP+ Chamber Shadow Ring 250013050
MxP+ Chamber Liner 250013052
MxP+ Cathode Liner 250013051
MxP+ GDP Quartz 250013048
eMax Chamber Liner 250013030
eMax Chamber Shadow Ring 250013027
eMax Chamber Cathode Liner 250013029
eMax Chamber Quartz Top Ring 250013026
Slit Valve Liner 250013053
Centura Slit Valve Liner 250013164
DNS Spin Cup 250012393
TEL Spin Cup 250012438
Wafer Carrier Wear Ring 250012311
ACT8 Coater Cup 250012349
Copper ACT8 Coater Cup 250012360
MK8 Coater Cup 250012355
Copper MK8 Coater Cup 250012359
Wafer Cassette Cleaning 250013093
Transport Wafer Box Cleaning 250012585
Oerlikon Carrier 250012096
Cold Trap 250012247
MV Clean Wear Ring 250012312
MV Clean Mounting Plate 250012313
MV Clean Inner Diaphragm 250012315
MV Clean Outer Diaphragm 250012314
Varian VIISion Ion Source 250012129
Varian VIISion Flight Tube 250012193
Varian VIISion Bushing Shield 250012172
Varian VIISion Faraday Magnet Assembly 250012556
Varian VIISion Main Faraday 250012209
Varian VIISion Extraction Rebuild 250012210
Varian E500 Source 250012238
Graphite Cleaning 250010000
Quartz Repair 250010001
Infusion Pump 250013379
XGT Valve 250010015
DxZ Hi-Temp Heater Refurbishment 250010032
Spindle Shaft Refurbishment 250010032
ProFace GP2600 250013326
Allen-Bradley Panelview 250013325
AMAT Profiler Titan II Head 250013333
MKS 253B Series Throttle Valves 250012639
MKS 653B Series Throttle Valves 250012640
MKS 683B Series Throttle Valves 250012938
HVA Gate Valves
MKS T3BIA Series Throttle Valves
Tylan MDVX Series Throttle Valves 250012658
MKS Pressure Controller (Various Models) 250012656
MKS Manometer (Various Models) 250012788
Mass Flow Controller / MFC (Various Models) 250012664
White Phosphorus Cold Trap


All product and company names are trademarks™ or registered® trademarks of their respective holders. Use of them does not imply any affiliation with or endorsement by them.


Service


HEPA Filter Bench Test and Installation Leak Test – using PSL spheres aerosol
Airflow Volume and Velocity Uniformity Measurements
Air Cleanliness Level Survey ISO 14644-1 / Airborne Particle Counts
Airflow Parallelism Survey
Differential Pressures – Static and Dynamic Measurements
Sound and Vibration Measurements
Electro Magnetic Interference Testing (both AC and DC)
Airflow Visualization and Smoke Studies
Full Spectrum Light Level (including UV) and Intensity Readings
Floor Conductivity, Electrostatic Discharge, and Ionization Measurements
Temperature and Relative Humidity Stability Monitoring
Retention and Recovery Testing
Microbial Air and Surface Sampling
Surface and Airborne Molecular Contamination Sampling
Biological Safety Cabinet Testing and Certification
USP797 Compliance Testing
USP800 Compliance Testing


All product and company names are trademarks™ or registered® trademarks of their respective holders. Use of them does not imply any affiliation with or endorsement by them.


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